Theoretical analysis of a piezoelectric thin film resonator with acoustic quarter-wave multilayers

The purpose of this paper is to theoretically analyse the piezoelectric thin film resonator with acoustic multilayers by considering acoustic loss, electrode thickness, and thickness deviation of respective layers including the piezoelectric film. The dependence of the resonance and antiresonance frequencies, the Q-factor, and the effective electromechanical coupling factor on resonator parameters, especially on the total number of multilayers, is discussed in contrast to the case of a piezoelectric film with traction-free surfaces.