Corrosion Resistance Dependence on Ta and Zr Densities in Co-Ta and Co-Zr Alloy Films

Corrosion characteristics of CoZr and CoTa, related to Zr and Ta composition densities, were studied. Corrosion characteristics were analyzed by measuring electrical resistance increase (ΔR/R
_o
) under 80°C and 85%RH atmosphere. It was confirmed that corrosion rates depended on Zr and Ta densities. Corroded layer thickness X was expressed by the equation X = ßlog(t + 1). It was found these films have excellent corrosion resistance.