Micromachined on-chip vacuum microtriodes with nanotube field emitters

Miniaturized power-amplifying vacuum devices in an on-chip form have been constructed by combining high performance nanomaterials with MEMS micromachining technology. Carbon nanotubes, one of the most fascinating new nano-materials, were incorporated into micromachined designs as cold cathode field emitters to create MEMS triode structured power amplifiers. Microstructure of the nanotube was characterised by SEM micrograph. MEMS device applications, design parameters, and device functions were discussed.