An efficient technique for substrate coupling parasitic extraction with application to RF/microwave spiral inductors

This paper presents an efficient modeling method based on the microstrip lines theory for the coupling between a substrate backplane and a device contact. We derive simple closed-form formulas for rapid extraction of substrate parasitics. We use these formulas to model spiral inductors as important substrate-noise sources in mixed-signal systems. The proposed model is verified for the frequencies up to 35 GHz, and is easily adaptable to CAD tools.