A study of field emission microtriodes

Structures simulating integrated field emission microtriodes have been successfully fabricated and tested. These microtriodes use Spindt-type molybdenum field emission cathodes with the anodes in three different configurations. The anodes are located at a distance d>5 mm, approximately 1.25 mm, and approximately 2-20 mu m from the gate electrode and the emitter tip. The effects of device operation on the performance of the Mo field emission tips operating in close proximity to anodes were presented. A transconductance of 0.5 mS (5 mu S/tip or 12 S/cm/sup 2/) and a cutoff frequency of 0.8 MHz have been measured. Extension of these results indicates that transconductances of 250 mS/mm and cutoff frequencies of 100 GHz may be possible.<
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