Fabrication of actuators using magnetostrictive thin films

A new concept of the microactuation driven by magnetostriction is proposed. We fabricated two kinds of cantilever actuators and a travelling machine, composed of the magnetostrictive thin films on a polyimide film. Amorphous Tb-Fe and Sm-Fe thin films were used as the magnetostrictive materials. These actuators moved without power supply cable and the cantilever actuators exhibited the large deflection in low magnetic fields. Such unique characteristics suggest that the magnetostriction is suitable for the driving force of the microactuator.