A 2×2 MEMS Optical Switch Based on Piezoelectric Actuation

A fully micromachined single mode 2times2 cross-bar optical switch based on noble piezoelectric actuation has been designed and simulated for small volume, low insertion loss and low switching voltage. Piezoelectric unimorph bender was used for actuating the micromirror of the switch. The performance of the switch was simulated in MATLAB. The required tip displacement of the micromirror had found 34.48mum at 50V. For 146.2mum input and output fiber end separation the insertion loss (IL) of the designed switch had found 0.7102dB, 1.6919dB and 2.219dB at 800nm, 1310nm and 1550nm wavelength respectively.