Composition control for evaporated CoCr thin films

Composition control was achieved in fabrication of CoCr thin films by evaporation onto tape-shaped polymer substrates. The vapor composition during deposition was determined by an atomic absorption type of detectors and a composition calculator. The gradual change of composition during deposition due to the difference in vapor pressure between Co and Cr was compensated by supplying Cr into the evaporator. As a result, the desirable composition was obtained to within an accuracy of 0.4 wt.%. This composition control system was shown to be suitable for the preparation of CoCr perpendicular magnetic recording media.<
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