GaAs/(Ga,Al)As heterojunction bipolar transistors with buried oxygen-implanted isolation layers

A simple self-aligned technique using oxygen implants to reduce the extrinsic base-collector capacitance in GaAs/(Ga,Al)As heterojunction bipolar transistors (HBT's) is described. This technique has been used to achieve nonthreshold logic ring-oscillators with propagation delays down to 30 ps per gate, the lowest reported to date for any bipolar transistor circuit.