Yield optimization in the mature fab

This paper provides the authors' insights and discussions in four areas of yield optimization available to the mature semiconductor fabricator. The mature fab is arbitrarily defined as fabs older than 3 years having feature sizes of >0.5 /spl mu/m. The areas of yield optimization include: (1) cost and implementation considerations for an integrated data collection and information analysis system; (2) use of a quantified and partitioned D/sub 0/ yield model; (3) focus on baseline yield quantification and improvement practices versus excursion controls; (4) increased roles and responsibilities for yield improvement.