Design of linear motor driving system for Nano-positioning stage

Considering the demands of driving the plane coil linear motor in Nano-positioning stage, a motor driver with small size and high-power was designed. To improve the accuracy of motor phase current detection, FIR filter and Cerebellar Model Articulation Controller (CMAC) neural network were adopted to reduce high-frequency noise and compensate the non-linear error of current sensor. The feasibility of the drive circuit and the validity of the filter and compensator were verified by experiments.