Si monolithic planar coreless inductors for high frequency signal transmission

In this paper, we present a silicon based planar coupled inductor coil that operates at high frequency region for signal transmission and converter applications. The study is aimed to investigate the role of coreless planar inductor coil design and MEMS technology for the fabrication of the high frequency signal converter. As the result, it is shown that the coupled inductor performances are significantly affected by the coil winding and geometry. An output voltage gain of -3 dB was observed for a coil operating frequency up to 10 MHz. Topics such as lumped element model and surface micromachining process are described in detail in this paper.