Quasi-blind voltage contrast in e beam inspection

The different inspection methodologies in e beam are put together to compare their inspection performance on irregularly periphery via plugs. The results demonstrate hot spot inspection mode has better alignment performance and higher sensitivity than leap and scan mode. Hot spot mode can inspect the tiny variation of voltage contrast (VC) with high sensitivities. One type of VC variation inspected by hot spot mode so call qausi-blind VC is addressed here that was not reported before.