1 × 2 Vertically optical splitter with 10-Gbps transmission rate for chip-level optical interconnects

A polymer waveguide monolithically integrated with three Si-based 45° reflectors realized on a Si substrate is proposed to form a 1 × 2 vertically optical splitter. A VCSEL chip at the input port and two PD chips at two output ports are flip-chip assembled on the proposed splitter to demonstrate the chip-level optical interconnects. The optical insertion loss of -4 dB with a splitting ratio of 1:1 for the proposed splitter is experimentally obtained. Finally, the reasonable eye patterns with an operating date rate of 10 Gbps at two output ports are also achieved.