The design and analysis of a proliferated-membrane of pressure sensor for low pressure applications

In this paper, the effect of incorporating a structure on the top of the membrane layer on the sensitivity and nonlinearity of pressure sensor are analysed using finite finite element analysis (FEA) software, CoventorWare which involved coupled analysis between MemMech and MemPZR. By considering the stress concentration region on the membrane structure, a newly developed design structure of proliferated membrane is compared to the typical structure. The optimum ratio of the beam width-to-the membrane length was obtained at 0.05. Additionally, the ratio of 1:1 in the beam-to-membrane thickness was significant in term of sensitivity. Simulation results showed that the sensitivity of the proliferated-CBM improves 40% whereas the nonlinearity reduces about 33 % in comparison to the flat membrane.