Solid-state Marx type modulator for Plasma Based Ion Implantation applications

This paper presents the first results of an innovative solid-state Marx type modulator connected to a Plasma Based Ion Implantation (PBII) system. The PBII system has two main objectives; support surface engineering research and assist the development of new pulsed power modulators for plasma applications. The results of preliminary tests done in nitrogen gas atmosphere, with 10
¹¹
cm
⁻³
ion density and 0.1 Pa pressure are discussed. About 25 µs width, 1 kHz negative pulses, of ∼10 kV negative amplitude, were applied to a metallic cylinder (100 mm × 10 mm) vertically placed on it, drawing 6 A peak current. The modulator limits the plasma short-circuit up to 100 A per pulse.