High speed sensing using ion sensitive field effect transistors

We present new preliminary data from arrays of ion sensor field effect transistors (ISFETs). Two devices are presented. The first consists of a planar array of ISFETs that are operated as an ion image sensor enabling the direct observation of ion flow over the surface of the chip in real-time. The second is an innovative form of Coulter-counter that is fully implemented in a CMOS-MEMS format. The device is tested as a cytometer by observing the flow of red-blood cells.