Exact closed-form expressions for substrate resistance and capacitance extraction in nanoscale VLSI

In this work a new exact formula for determining the substrate resistance and capacitance is presented. For the formula analytical results of the Laplace equations of equivalent problems are exploited. Both simulation and measurement data are utilized in order to show the validity of the proposed formula. The measurement data are obtained from a fabricated test chip. The results show that the proposed method succeeds in computing the substrate resistance.