A Lens Holder in Conjunction With a MEMS Platform for On-Chip Aligning and Fixing of a Ball Lens in Silicon Photonics Packaging

This letter reports a microelectromechanical system (MEMS) lens holder serving as a key component for on-chip aligning and mechanical fixing of an optical ball lens in silicon photonics packaging. The lens holder, which consists of a suspended mass, is attached onto a previously developed MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300 μm in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail.