Vertical comb-drive MEMS mirror with sensing function for phase-shift device

We aim to achieve the phase-shift device which is a key component of two-dimensional Fourier spectrometer using the MEMS mirror fabricated by the micro fabrication technology. This mirror maintains parallel movement to the reference plane toward the vertical direction with a high precision. Therefore, in this study, the vertical electrostatic comb-drive actuator and displacement capacitive sensors were fabricated monolithically on one chip, and they were arrayed in 4 directions of the movable mirror. We fabricated the MEMS mirror that can move toward the vertical direction with sensing the tilting angle. As the result, we confirmed that the vertical comb-drive MEMS mirror with the sensing function for the phase-shift device could be realized.