Improved analysis for the intermodulation performance of the contact-type MEMS microswitch

This paper presents an improved analysis for the intermodulation performance of the contact-type MEMS microswitches. Contrary to the previously published analysis, where the source voltage comprises two equal-amplitude sinusoids, in this paper the source voltage is a mutisinusoidal signal comprising 2
^N
equal-amplitude equally-spaced sinusoids. Previously published results can, therefore, be obtained as a special case of the present analysis with N =1. Moreover, the results show that as N increases the relative third-order intermodulation performance rapidly deteriorates.