Demonstration of PECVD SiC–SiO $_{2}$–SiC Horizontal Slot Waveguides

We report on the first demonstration of guiding light in horizontal slot-waveguides using a plasma-enhanced chemical vapor deposition silicon carbide (SiC)-silicon oxide (SiO
₂
)-SiC structure. Propagation losses of 23.9 ±1.2 dB/cm have been measured for the quasi-transverse-magnetic mode of the fabricated slot waveguides at 1.3 ¿m .