Cross-order echelle grating triplexer based on amorphous silicon nanowire platform

We present fabrication and measurement results of an ultracompact silicon-on-insulator-based echelle-grating triplexer, which uses different diffraction orders to cover a large spectral range from 1.3 mum to 1.5 mum, with a footprint of 150 mum times 200 mum.