Automatic wire bonder designed for MEMS packaging

This paper introduces zoom microscope into the microscope positioning system to settle the contradiction between microscope’s visual range and depth of field. In the whole bonding application, bond targets’ identification and orientation are the most important aspects for full-automation. Multiple scale images go through various image processing programs, and finally different bond targets are identified and positioned This measure is called “global-coarse and local-precise orientation”, with which full-automation bonding is realized. A zoom microscope based micro-positioning system was used to capture the multiple magnification images. The requirement for real-time auto-focusing for zoom microscope is proposed based on the analysis of zoom microscope model.