Low Loss Si–SiO $_{2}$–Si 8-nm Slot Waveguides

Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at lambda = 1.565 mum is achieved in horizontal Si(amorphous)-SiO
₂
-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ~ 3 x 10
⁵
.