The Evolution of MEMS Displays

Due to the advancement of microoptoelectromechanical systems and microelectromechanical systems (MEMS) technologies, novel display architectures have emerged. One of the most successful and well-known examples is the Digital Micromirror Device from Texas Instruments, a 2-D array of bistable MEMS mirrors, which function as spatial light modulators for the projection display. This concept of employing an array of modulators is also seen in the grating light valve and the interferometric modulator display, where the modulation mechanism is based on optical diffraction and interference, respectively. Along with this trend comes the laser scanning display, which requires a single scanning device with a large scan angle and a high scan frequency. A special example in this category is the retinal scanning display, which is a head-up wearable module that laser-scans the image directly onto the retina. MEMS technologies are also found in other display-related research, such as stereoscopic (3-D) displays and plastic thin-film displays.