Modeling and simulation of footing effect in DRIE process

In this paper, the footing effect of DRIE process is studied and simulated. Based on the charging mechanism of the footing effect, local electric field and ion deflexion caused by the charging is very important for the precise simulation of the footing effect. Thus, we first modeled and numerically simulated the charging effect to calculate the local electric field and deflexed ions, and then couple the numerical simulation results to the DROPIE to emulate the footing profile evolution. Finally the footing effect has been simulated successfully and compared with experimental results, they agree each other very well.