A Capillary Microgripper Using Electrowetting

A new type capillary force microgripper that can pick up and release micro objects by electrowetting is presented. Electrowetting was utilized to dynamically change the contact angle between the liquid bridge and the gripper surface to control the capillary lifting forces. A coplanar interdigitated gold electrode pair was employed to simplify the microfabrication. The lifting force generated by the microgripper was experimentally characterized. The pick and release routine were successfully demonstrated for various micro glass beads whose weight ranges from 77 muN to 136 muN. The design, microfabrication and testing of the microgripper are presented.