Characterization of Refractive Index Distribution in Spherical Microlenses Fabricated by Deep Proton Writing

In this letter, we present the results of the refractive index measurements on deep proton writing microlenses. The measurement method used is interferometric tomography. It is a nondestructive method for the determination of the 3-D internal refractive index distributions. The influence of the different fabrication steps on the refractive index distribution is discussed.