A Self-Resonant MEMS-Based Electrometer

A configurable MEMS electrometer that allows for isolated, high-input-impedance voltage measurements is presented. By adjusting the separation between the measurement surface and a vibrating MEMS element, the noise floor and/or maximum dynamic range can be tailored to the specific application. This device is useful for a broad range of applications, including pH meters, biopotential amplifiers, xerography, and measuring leakage on high-voltage capacitors.