3 - DOF Planar Induction Motor

The paper discusses characteristics and experimental results of a multi-axes direct drive system. The investigated planar motor works with individually controlled single-sided linear induction motors in a common mover. It can move in three degrees of freedom (3-DOF), i.e. in the translation coordinates x and y and in the rotation coordinate φzb. The construction is explained and the functionality is proven by a tracking curve. Advantages of planar motors to other drive solutions are discussed.