Distributed MEMS tunable matching network using minimal-contact RF-MEMS varactors

This paper presents the design, fabrication, and measurement of a double-slug tunable matching network based on a distributed microelectromechanical-system (MEMS) transmission line. The tuner is implemented with a new minimal-contact RF-MEMS varactor that largely eliminates stiction while allowing the capacitance ratio to be set anywhere from 2 to 5. The measured performance of the tunable matching network demonstrates complete coverage of the Smith chart out to a maximum voltage standing-wave ratio of 12:1 from 10 to 30 GHz with excellent agreement between measurement and simulation results.