Electrooptic modulation of multisilicon-on-insulator photonic wires

This paper proposes and analyzes electrically modulated submicrometer-size high-index-contrast waveguides (photonic wires) based on a multisilicon-on-insulator (MSOI) platform. Metal-oxide-semiconductor junctions are used to control the effective refractive index of the waveguides. The electrooptic structures are electrically and optically modeled. The performances of the studied configurations are analyzed and compared in terms of phase modulation efficiency, optical losses, and operation speed, and the feasibility of their fabrication is discussed. Calculations indicate that the proposed schemes can be used to achieve highly efficient phase shifters (V/sub /spl pi//L/sub /spl pi//<1 V-cm) based on photonic wires on MSOI, with data transmission rates ranging from 3 to 10 Gb/s.