Electroplated hard magnetic material and its application in microelectromechanical systems

We describe the preparation of CoNiMnP-based permanent-magnet material using several sulfate and chloride solutions. We studied eight samples, and all the samples show vertical magnetic anisotropy. Sample8, which was electroplated from a low-concentration chloride solution and under external magnetic field, demonstrates the best magnetic properties with coercivity 2632 Oe, remanence 0.20 T, and maximum magnetic energy 10.185 kJ/m/sup 3/. An array structure can avoid the stress between the electroplated layer and the seed layer. The electroplated Co/sub 0.8/Ni/sub 0.1174/Mn/sub 0.0062/P/sub 0.0762/ permanent magnet has potential for bidirectional actuators in micro-electromechanical systems.