Batch-fabricated high dense multi sliders for WDM spectral attenuation

This paper reports MEMS based mechanical dynamic gain equalizer (hereafter DGEQ) which is expected to equalize the nonuniformities of spectral intensity in WDM transportation. Batch-fabricated multisliders for DGEQ are presented as our continuous research on optical application of electrostatic controlled linear inchworm actuator (hereafter ECLIA). 16 multisliders (600 /spl mu/m wide) corresponding to 16 channels are fabricated by DRIE and bonded on a pyrex glass substrate for a reliable electrical isolation. Operating of developed multisliders and their optical attenuation as DGEQ will be reported in succession to design and fabrication of device.