Novel technique for mechanical stresses determination in thin films

A novel technique for mechanical stresses determination in thin films has been proposed and tested for thin metal films on refractory metals basis. The new method provides the possibility of mechanical stresses distribution determination along of the films thickness. Experimental results concern films of Mo and alloys of Mo-Re deposited with a magnetron sputtering. Films material and sputtering conditions influence on a profile shape of the films fixed with SEM and on the total mechanical stresses values are described.