A novel type of piezoelectric minimotor for linear displacements

This work shows the results of our studies on a new type of piezoelectric minimotor for precision linear displacements. The stator structure consists of two piezoelectric ceramics adhered to a thin copper plate patterned in such a way that elliptic motion can be generated when driven by two sinusoidal voltages with a phase difference. A simple stage, pressed against the top surface of the tip of the stator, can move following a straight line. The actuation is based on the planar vibration mode of small ceramic plates. The copper plate is patterned using photolithography and etching. In this way, complex geometries can be obtained.