Two-dimensional vertical-cavity surface-emitting laser arrays fabricated by zinc diffusion

Vertical-cavity surface-emitting laser (VCSEL) arrays with seven devices arranged in a honeycomb pattern have been fabricated by a selective zinc diffusion process. An optical coupled theory is used to predict the mode behavior. A mixing in-phase, out-phase supermodes, and individual single mode operation has been observed and the power ratio among these modes is strongly dependent on the device spacing.