Miniaturization of angular rate sensor element using bonded quartz tuning fork

We developed an extraordinarily miniaturized quartz tuning fork angular rate sensor element(5.3/spl times/0.94/spl times/0.24 mm). In order to miniaturize an element without sensitivity degradation, we introduced composite quartz by bonding two monolithic wafers with reversing x axes. Moreover we applied photolithography which achieved fine patterning and excellent productivity. The sensor using the new element accomplished the specifications of angular rate sensor.