MOSFET simulation - TCAD tools/packages

Industry-standard TCAD software packages are widely used by semiconductor companies to optimise processes and devices in integrated circuits fabrication. After process and device simulation one can go ahead with circuit simulation using Spice. This paper focuses on the matching of these program packages in the area of parameter and characteristics extraction. We compared the transfer characteristics of n-type MOSFET, biased in the linear region, obtained from Synopsys package including TSUPREM4 and MEDICI with transfer characteristics from PSpice package.