Large travel ultra precision x-y-/spl theta/ motion control of a magnetic-suspension stage

This paper presents an indirect adaptive-control approach and its implementation for realizing large travel ultra precision x-y-theta motion control of a magnetic-suspension stage, which is actuated by ten electromagnets and is capable of six-degrees-of-freedom motion. Feedback linearization of the nonlinear force relationship of the electromagnet in terms of the coil current and the air gap is implemented. Due to modeling errors, perfect feedback linearization is not possible, and parameter variations of the feedback-linearized system are demonstrated through closed-loop system identification. Each axis of the feedback-linearized system is then modeled as a double integrator having gain value depending on the position of the stage and subjected to a disturbance. For the purpose of large travel x-y-theta motion control, an indirect adaptive-control algorithm is designed and implemented for each axis of the feedback-linearized system. The developed control algorithm consists of three procedures: a) real-time parameter estimation; b) model cancellation; and c) nominal linear control. Experimental results demonstrate that the indirect adaptive controllers have superior tracking ability when compared to constant gain robust linear H/sup /spl infin// controllers.