A new bumping process using lead-free solder paste

In this paper, we report development of a new process for lead-free solder bumping with no flux residues, using stencil printing and hydrogen radicals, which can lessen both the environmental load and the manufacturing cost of solder bumping. In this process the reduction of the hydrogen radicals, instead of the flux, will eliminate the surface oxides of the stencil printed lead-free solder paste. Sn-3.0Ag-0.5Cu lead-free solder paste, which contains no residue flux was printed on an 8-in wafer. Hydrogen plasma was radiated for a minute during the reflow process, and the printed paste formed a bump. Reflow experiments without hydrogen radicals treatment were also carried out for comparison, where no successful reflow could be observed.