Surface roughness of magnesium oxide buffer layers grown by inclined substrate deposition

Biaxially textured MgO films were grown by inclined substrate deposition (ISD) as template layers for YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO)-coated conductors. The surface roughness of films deposited at different angles and with varying thickness was examined by atomic force microscopy. Results were correlated with the texture, measured by X-ray diffraction, to determine the optimal thickness and deposition angle.