Two-Dimensional Numerical Analysis of Latchup in a VLSI CMOS Technology

The latchup behavior of a VLSI CMOS technology using hybrid Schottky-ohmic contact sources and drains and a high resistivity substrate has been extensively studied via two dimensional numerical simulation. The modeling allows quantitative explanation of the triggering and sustaining behavior of such structures, as well as an accurate characterization of the influence of the various process and geometrical parameters on the resistance to latchup. The technology is compared to a corresponding low resistivity substrate (epi) CMOS technology.