Novel electrostatic repulsion forces in MEMS applications by nonvolatile charge injection

This paper demonstrates, for the first time, electrostatic repulsion forces between two isolating beams as a viable actuation mechanism in MEMS applications by nonvolatile charge injection. Devices integrating MEMS beams and EEPROM structures have been fabricated and an actuation force of /spl sim/0.2 /spl mu/N has been recorded across a 3 /spl mu/m gap for beams 360 /spl mu/m in length. Larger actuation forces can be achieved through smaller gaps. A capacitor-network model is presented for analyzing such systems. This scheme holds promises in complimenting attractive electrostatic actuation and also finds valuable applications in achieving wear-free micro-bearings, hinges and turbines.