Three-dimensional nanoassembly of multi-walled carbon nanotubes through nanorobotic manipulations by using electron-beam-induced deposition

Nanoassembly of multi-walled carbon nanotubes (MWNTs) in three-dimensional space by using electron-beam-induced deposition (EBID) is realized through nanorobotic manipulations. Concept of parallel EBID is presented and feasibility of using MWNTs as electron-beam emitters for EBID is investigated. A selection method of carbon nanotubes (CNTs) from raw materials according to their mechanical properties is presented, which is realized through buckling a nanotube with nanorobotic manipulators. Destructive construction of CNT-based nano building blocks is also demonstrated by extracting an inner layer from outer layer of a multi-walled carbon nanotubes, which is potentially a nanometer scale bearing. MWNT-junctions are constructed with EBID through nanorobotic manipulations.