Development of a method of 3D manipulation of individual ZnO nanowires using shape memory nanotweezers

ZnO nanowires are recognized as prospective active material for highly sensitive biological or gas sensors. The objective of the work is the experimental development of the technology of 3D nanomanipulation and nanoassemling of the sensing nanostructures using ZnO nanowires. The 50 nm thick and
$3\ -5\ \ \mu\mathrm{m}$
long ZnO nanowires with hexagonal wurtzite structure were prepared by hydrothermal method. The system for nanomanipulation of the individual nanowires in SEM included Kleiniek nanomanipulator equipped with Ti
2
NiCu composite nanotweezers with shape memory effect. The necessary parameters of the nanotweezers are discussed and the characteristics of the nanomanipulation and nano-assembly procedure are considered.