A Novel Multi-Electrode RF-MEMS Switch for Bipolar Actuation Bias Leakage Reduction

A novel RF-MEMS switch structure is presented using a two-electrode actuator. The proposed structure allows bringing the switch mechanical structure in contact with a dielectric layer, increasing the contact force. By applying two opposite square bipolar voltages on the two parts of the actuator, the bias signal leakage in the RF-path is reduced from 30 mV down less than 5 mV.