Review on Error Compensation and Cooperative Control of Multi-axis Motion Platform

With the continuous improvement of technical indexes of precision electronic packaging equipment, its performance is primarily confirmed by the motion features of the multi-axis motion platform, which plays a key role for the precision packaging equipment. In recent years, the control technologies of multi-axis motion platforms have been rapidly developed to satisfy the demands of high precision and high acceleration. Nevertheless, under the condition of high-speed and large stroke motion, the motion platform usually has very limited positioning accuracy. The positioning accuracy of a multi-axis motion stage has become increasingly prominent for high-end electronic packaging equipment, and will determine their performance. In view of the motion planning, dynamic error compensation, and multi-axis cooperative control involved in the multi-axis motion platform, the research progress on this topic is investigated and described in this paper. The key issues related to the motion platform are summarized and the future development trend is prospected.