Fuzzy Tuning Algorithm for Feedforward Parameter Based on IC Package for Mass Transfer of Micro-LED Equipment XY Motion Platform

With the advent of the next generation display technology, high-speed and high-precision mass transfer has become a core technology to solve high-density Micro-LED transfer packaging. Aiming at the problem of feedforward parameter tuning of XY platform composite controller in Micro-LED mass transfer equipment, the intelligent tuning methods of feedforward parameters were researched, and an intelligent tuning algorithm of feedforward parameters based on fuzzy thought was proposed. The system response of XY motion platform with different speed feedforward and acceleration feedforward parameters was explored through experiments, and the influence law of the two feedforward controllers on the system response indexes was determined. Then, based on the thought of fuzzy control and the dynamic characteristics of the system, the fuzzy intelligent tuning algorithm for feedforward parameters was designed theoretically. Finally, based on the traditional three-loop PID control, the optimal speed feedforward parameters and acceleration feedforward parameters were set by fuzzy tuning algorithm. The feedforward parameters were applied to the X-axis servo control of XY motion platform to verify the effectiveness of the algorithm. The experimental results show that the optimal speed feedforward parameter 24.27 and acceleration feedforward parameter 52.68 can be automatically set in 34s under given conditions. The feedforward parameters obtained by the adjustment act on the X-axis of XY motion platform, which makes the system's adjustment time decrease from 30ms to less than 5ms. All these results show that the proposed algorithm can significantly improve the speed of controller parameter tuning, and the optimization efficiency is much higher than the manual trial and error method.